Isotropic vs. anisotropic etching. Most wet etching methods are isotropic to some degree, which can lead to problems like undercutting. With the notable exception of scratching out traces with an ...

Isotropic etching is useful for creating curved or sloped nanostructures, such as nanolenses or tapered nanowires. Anisotropic wet etching exhibits directional dependence, with faster etching in ...

is a dry etching technique widely used in the fabrication of micro- and nanodevices. It combines the chemical reactivity of reactive species with the physical bombardment of energetic ions to achieve ...

Reactive Ion Etch (RIE) is a physical etch process. A rich plasma has been made just above the wafer, and the ions are expedited toward the surface to generate a highly powerful anisotropic etch.