Isotropic etching is useful for creating curved or sloped nanostructures, such as nanolenses or tapered nanowires. Anisotropic wet etching exhibits directional dependence, with faster etching in ...

Each etch mode has different attributes, such as selectivity and directionality. Directionality involves anisotropic and isotropic etching. “(In sputter etching), we can get high anisotropy, but not ...

Reactive Ion Etching (RIE) is a dry etching technique widely used in the fabrication of micro- and nanodevices. It combines the chemical reactivity of reactive species with the physical bombardment of ...

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