Today, some existing etch tools can perform selective etches to one degree or ... The radicals become the species that performs the chemical etching in a plasma etch system. These free radicals ...

RIE enables the precise patterning of nanoscale features with high aspect ratios, making it an essential tool in the manufacturing ... enhances the chemical reactions at the surface and provides ...

is a highly controlled and selective etching technique that removes material layer by layer at the atomic scale. It is a cyclic process that relies on self-limiting chemical reactions to achieve ...