Tom's Hardware on MSN7d
Chinese scientists create 'breakthrough' solid-state DUV laser light source for chipmaking tools
The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from ...
Nature3mon
Pushing deep ultraviolet lithography to its limits
Interestingly, DUV lithography at a wavelength ... change in technology for the ray-path optics, as only mirrors in a vacuum are able to route EUV light 7. Several development programmes are ...
DIGITIMES4d
Chinese researchers develop solid-state 193nm DUV laser targeting advanced chipmaking
Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...