近日，中国科学院（CAS）研究人员成功研发突破性的固态深紫外（DUV）激光，能发射 193 纳米的相干光（Coherent ...

IT之家 3 月 25 日消息，据国际光电工程学会（SPIE）消息，中国科学院（CAS）研究人员成功研发突破性的固态深紫外（DUV）激光， 能发射 193 nm 的相干光（Coherent Light），该波长目前被用于半导体曝光技术 。

据国际光电工程学会（SPIE）报道，中国科学院（CAS）研究人员成功研发突破性的固态深紫外（DUV）激光，能发射193纳米的相干光（Coherent Light），与当前被广泛采用的DUV曝光技术的光源波长一致。

3月24日消息，中国科学院（CAS）研究人员成功研发突破性的固态深紫外（DUV）激光，能发射 193 纳米的相干光（Coherent ...

The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from commercialization.

The team is now developing DUV-LED light sources for a range of applications, including virus inactivation. The pLED was established at Tokushima University, on Shikoku, an island off central ...

from the DUV to the far-shorter wavelength of 13.5 nm in the EUV has proved difficult to achieve, despite years of research. The creation of a suitable source that can reliably generate light with ...