Press a button, and in about 30 seconds, you have a wonderfully etched piece of metal. [Gelandagan] has some templates that will allow you to make your own electro etcher, provided you can etch ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices. We are collaborating with Prof. Victor Bright’s ...

The etching was achieved by combining deep ultraviolet ... Another highlight is the electro-optic Mach-Zehnder modulator (MZM), a device widely used in today's high-speed optical fiber communication.