Dry etching methods are all anisotropic processes ... First, a bit about nomenclature. Compounds with metal cations (positively charged species) have traditionally used different suffixes to ...

A lab mistake led to self-forming spiral patterns on metal surfaces, revealing chemical-mechanical interactions.

UCLA doctoral student Yilin Wong left a sample out by mistake. It was a small chip made of germanium, topped with thin layers ...

This includes three dry etchers with a range of capabilities ... coupled plasma to achieve a high density plasma for enhanced anisotropic etching. This system is limited to non-metal samples and ...

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