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Tom's Hardware on MSNChinese scientists create 'breakthrough' solid-state DUV laser light source for chipmaking ...The Chinese Academy of Sciences has developed a light source that produces 193-nm DUV light, but it is years away from commercialization.
Abstract: The deep-ultraviolet (DUV) band presents an untapped opportunity for enhancing optical wireless communication, particularly in outdoor environments where visible light often falls short. To ...
Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor ...
However, low external quantum efficiency (EQE), limited response speed, and inefficient light extraction remain major challenges for conventional AlGaN-based DUV diodes. Recently, a team from the ...
IT之家3 月 25 日消息,据国际光电工程学会(SPIE)消息,中国科学院(CAS)研究人员成功研发突破性的固态深紫外(DUV)激光,能发射 193 nm 的相干光(Coherent Light),该波长目前被用于半导体曝光技术。 论文介绍称,深紫外相干光,尤其是 193 nm 波长的光 ...
研究人员成功研发突破性的固态深紫外(DUV)激光,能发射 193 nm 的相干光(Coherent Light),该波长目前被用于半导体曝光技术。 论文介绍称 ...
3月24日消息,中国科学院(CAS)研究人员成功研发突破性的固态深紫外(DUV)激光,能发射 193 纳米的相干光(Coherent Light),与当前被广泛采用的DUV ...
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