Abstract: In this review article, various aspects of plasma etching for very large scale integrated (VLSI) circuit technology are presented. The motivation for using plasma etching and the advantages ...

Abstract: Plasma-based dry etching techniques play a major role in the formation of silicon-based integrated circuits. The first part of this paper reviews our understanding of the means for achieving ...

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Not many would have predicted Raphinha to be having the season he is, but the Leeds United hero is quickly becoming the favourite to win the 2025 edition of the Ballon d’Or. Barcelona almost went six ...

Emma Schutter has etched her name all over the Dayton Flyers softball record book. • She’s the program’s all-time leader with 632 at-bats, through Sunday. Alyssa Cacini set the old record of ...