Sputtering is a process where an atom is ejected from the surface of a sample as it’s bombarded by the high energy particles. As the ion beam passes over the surface it sputters ions, and produces ...

In a real fab, metal layers are added to chips using some form of deposition or sputtering method, each of which needs some expensive vacuum equipment. [ProjectsInFlight] wanted a more ...

The research team, led by Issei Suzuki (senior assistant professor) and Taichi Nogami (PhD candidate), developed a novel sulfur plasma-assisted sputtering method to precisely control the sulfur ...

The integration of a sputtering process monitor, which measures the composition and concentration of the particles in the gas phase during the coating processes, enables the control and ...